Leakage mechanism in ion implantation isolated AlGaN/GaN heterostructures

Yu, Hao; Putcha, Vamsi; Peralagu, Uthayasankaran; Zhao, Ming; Yadav, Sachin; Alian, Alireza; Parvais, Bertrand; Collaert, Nadine

doi:10.1063/5.0076243

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Leakage mechanism in ion implantation isolated AlGaN/GaN heterostructures

Date

2022

Journal article

https://doi.org/10.1063/5.0076243

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Yu, Hao

;

Putcha, Vamsi

;

Peralagu, Uthayasankaran

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;

;

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JOURNAL OF APPLIED PHYSICS

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Leakage mechanism in ion implantation isolated AlGaN/GaN heterostructures

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