Determination of tunnelling parameters in ultra-thin oxide poly-Si/SiO2/Si structures

dc.contributor.author	Depas, Michel
dc.contributor.author	Vermeire, Bert
dc.contributor.author	Mertens, Paul
dc.contributor.author	Van Meirhaeghe, R. L.
dc.contributor.author	Heyns, Marc
dc.contributor.imecauthor	Mertens, Paul
dc.contributor.imecauthor	Heyns, Marc
dc.date.accessioned	2021-09-29T13:05:46Z
dc.date.available	2021-09-29T13:05:46Z
dc.date.embargo	9999-12-31
dc.date.issued	1995
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/624
dc.source.beginpage	1465
dc.source.endpage	1471
dc.source.issue	8
dc.source.journal	Solid-State Electronics
dc.source.volume	38
dc.title	Determination of tunnelling parameters in ultra-thin oxide poly-Si/SiO2/Si structures
dc.type	Journal article
dspace.entity.type	Publication
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