Alternative EUV mask technology to compensate for mask 3D effects

Simple item page Full metadata Statistics

Files

31967.pdf 1.41 MB

Author(s)

Van Look, Lieve

;

Philipsen, Vicky

;

Hendrickx, Eric

;

Vandenberghe, Geert

;

Davydova, Natalia

;

Wittebrood, Friso

;

De Kruif, Robert

;

Van Oosten, Anton

;

Miyazaki, Junji

;

Fliervoet, Timon

;

Van Schoot, Jan

;

Neumann, Jens Timo

Metrics

1886 since deposited on 2021-10-23

Acq. date: 2025-10-23