Publication:

Temperature coefficient of resistance and thermal boundary conductance determination of ruthenium thin films by micro four-point probe

Date

2024
Journal article
https://doi.org/10.1088/1361-6501/ad366b
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dc.contributor.authorBeltran-Pitarch, Braulio
dc.contributor.authorGuralnik, Benny
dc.contributor.authorBorup, Kasper A.
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorHansen, Ole
dc.contributor.authorPryds, Nini
dc.contributor.authorPetersen, Dirch H.
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2025-04-28T13:07:56Z
dc.date.available2024-04-09T17:57:45Z
dc.date.available2025-04-28T13:07:56Z
dc.date.embargo2024-04-02
dc.date.issued2024
dc.description.wosFundingTextThe authors acknowledge financial support from Innovation Fund Denmark for the Industrial Postdoc 1045-00029B and the Independent Research Fund Denmark (Grant No. 8048-00088B).
dc.identifier.doi10.1088/1361-6501/ad366b
dc.identifier.issn0957-0233
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43805
dc.publisherIOP Publishing Ltd
dc.source.beginpageArt. 066012
dc.source.endpageN/A
dc.source.issue6
dc.source.journalMEASUREMENT SCIENCE AND TECHNOLOGY
dc.source.numberofpages9
dc.source.volume35
dc.subject.keywordsRELIABILITY
dc.title

Temperature coefficient of resistance and thermal boundary conductance determination of ruthenium thin films by micro four-point probe

dc.typeJournal article
dspace.entity.typePublication
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