Publication:
Selective vertically aligned CNT growth in vias for BEOL applications, using catalyst electrodeposition and plasma CVD
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1775 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-15
Citations
Metrics
Views
1775 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-15
Citations