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Selective vertically aligned CNT growth in vias for BEOL applications, using catalyst electrodeposition and plasma CVD

Date

2008
Meeting abstract
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dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.date.accessioned2021-10-17T10:15:39Z
dc.date.available2021-10-17T10:15:39Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14388
dc.source.conferenceInternational Symposium on Surface Science and Nanotechnology - ISSS-5
dc.source.conferencedate9/11/2008
dc.source.conferencelocationTokyo Japan
dc.title

Selective vertically aligned CNT growth in vias for BEOL applications, using catalyst electrodeposition and plasma CVD

dc.typeMeeting abstract
dspace.entity.typePublication
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