Publication:

Physical characterization of ultrathin high k dielectrics

Date

2003
Proceedings Paper
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Author(s)

Vandervorst, Wilfried  
;
Brijs, Bert
;
Bender, Hugo  
;
Conard, Thierry  
;
Petry, Jasmine
;
Richard, Olivier  
;
Van Elshocht, Sven  
;
Delabie, Annelies  
;
Caymax, Matty  
;
De Gendt, Stefan  
;
Cosnier, Vincent
;
Green, Martin
;
Chen, Jerry

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1949 since deposited on 2021-10-15
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Acq. date: 2025-12-09

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