Strong correlation between dielectric reliability and charge trapping in SiO2/Al2O3 gate stacks with TiN electrodes

Publication:

2002

Proceedings Paper

Author(s)

Kerber, Andreas

;

Cartier, Eduard

;

;

Pantisano, Luigi

;

;

2022 since deposited on 2021-10-14

Acq. date: 2026-07-18