Publication:

Line width dependent mobility in high-k – a comparative performance study between FUSI and TiN

Date

2007
Proceedings Paper
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Author(s)

Pantisano, Luigi
;
Trojman, Lionel
;
Severi, Simone  
;
San Andres Serrano, Enrique
;
Kerner, Christoph  
;
Veloso, Anabela  
;
Ferain, Isabelle
;
Hoffmann, Thomas Y.
;
Groeseneken, Guido  
;
De Gendt, Stefan  

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1921 since deposited on 2021-10-16
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1921 since deposited on 2021-10-16
Acq. date: 2026-01-25

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