Publication:
Line width dependent mobility in high-k – a comparative performance study between FUSI and TiN
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1919 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-09
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Metrics
Views
1919 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-09
Citations