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Depth profiling of B through silicide on silicon structures, using secondary ion-mass spectrometry and resonant postionization mass spectrometry
Publication:
Depth profiling of B through silicide on silicon structures, using secondary ion-mass spectrometry and resonant postionization mass spectrometry
Date
1996
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Bisschop, Peter
;
Gomez, J.
;
Geenen, Luc
;
Vandervorst, Wilfried
Journal
J. Vacuum Science and Technology B
Abstract
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1905
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
1905
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations