Publication:
Strain-related peculiarities of B incorporation in epitaxial Si1-xGex source/drain materials and their impact on electrical properties
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1968 since deposited on 2021-10-31
Acq. date: 2026-02-26
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Statistics
Views
1968 since deposited on 2021-10-31
Acq. date: 2026-02-26
Citations