Publication:

Sidewall damage and electrical performance of porous dielectrics in narrow spaced interconnects

Date

2004-05

Proceedings Paper

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Author(s)

Iacopi, Francesca

;

Travaly, Youssef

;

Stucchi, Michele

;

Struyf, Herbert

;

Peeters, Stefan

;

Jonckheere, Rik

;

Leunissen, Peter

;

;

Sutcliffe, Victor

;

Richard, Olivier

;

Van Hove, Marleen

;

Metrics

1874 since deposited on 2021-10-15

Acq. date: 2026-01-07