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Sidewall damage and electrical performance of porous dielectrics in narrow spaced interconnects
Publication:
Sidewall damage and electrical performance of porous dielectrics in narrow spaced interconnects
Date
2004-05
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Iacopi, Francesca
;
Travaly, Youssef
;
Stucchi, Michele
;
Struyf, Herbert
;
Peeters, Stefan
;
Jonckheere, Rik
;
Leunissen, Peter
;
Tokei, Zsolt
;
Sutcliffe, Victor
;
Richard, Olivier
;
Van Hove, Marleen
;
Maex, Karen
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1872
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1872
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations