Publication:

Sidewall damage and electrical performance of porous dielectrics in narrow spaced interconnects

Date

2004-05
Proceedings Paper
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dc.contributor.authorIacopi, Francesca
dc.contributor.authorTravaly, Youssef
dc.contributor.authorStucchi, Michele
dc.contributor.authorStruyf, Herbert
dc.contributor.authorPeeters, Stefan
dc.contributor.authorJonckheere, Rik
dc.contributor.authorLeunissen, Peter
dc.contributor.authorTokei, Zsolt
dc.contributor.authorSutcliffe, Victor
dc.contributor.authorRichard, Olivier
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorPeeters, Stefan
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-15T14:01:02Z
dc.date.available2021-10-15T14:01:02Z
dc.date.issued2004-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9084
dc.source.beginpageF1.5
dc.source.conferenceMaterials,Technology, and Reliability of Andvanced Interconnects and Low-K Dielectrics
dc.source.conferencedate11/04/2004
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Sidewall damage and electrical performance of porous dielectrics in narrow spaced interconnects

dc.typeProceedings paper
dspace.entity.typePublication
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