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Transmission electron diffraction techniques for nm scale strain measurement in semiconductors
Publication:
Transmission electron diffraction techniques for nm scale strain measurement in semiconductors
Date
1996
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhellemont, Jan
;
Janssens, Koenraad
;
Frabboni, S.
;
Smeys, Peter
;
Balboni, R.
;
Armigliato, A.
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1984
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
1984
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations