Publication:

Transmission electron diffraction techniques for nm scale strain measurement in semiconductors

Date

1996
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorJanssens, Koenraad
dc.contributor.authorFrabboni, S.
dc.contributor.authorSmeys, Peter
dc.contributor.authorBalboni, R.
dc.contributor.authorArmigliato, A.
dc.date.accessioned2021-09-29T15:44:15Z
dc.date.available2021-09-29T15:44:15Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1608
dc.source.beginpage479
dc.source.conferenceDiagnostic Techniques for Semiconductor Materials Processing II
dc.source.conferencedate27/11/1995
dc.source.conferencelocationBoston, MA USA
dc.source.endpage490
dc.title

Transmission electron diffraction techniques for nm scale strain measurement in semiconductors

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
1583.pdf
Size:
916.91 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions