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Integration of low and high temperature junction anneals for 45nm CMOS
Publication:
Integration of low and high temperature junction anneals for 45nm CMOS
Date
2004
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lindsay, Richard
;
Pawlak, Bartek
;
Henson, Kirklen
;
Satta, Alessandra
;
Severi, Simone
;
Lauwers, Anne
;
Surdeanu, Radu
;
McCoy, S.
;
Gelpey, J.
;
Pagès, Xavier
;
Maex, Karen
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1875
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1875
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations