Publication:
Correlation between predicted cause of SRAM failures and in-line defect data
Date
| dc.contributor.author | Coppens, P. | |
| dc.contributor.author | Vanhorebeek, Guido | |
| dc.contributor.author | De Backer, E. | |
| dc.date.accessioned | 2021-10-14T16:43:47Z | |
| dc.date.available | 2021-10-14T16:43:47Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5169 | |
| dc.source.beginpage | 53 | |
| dc.source.endpage | 57 | |
| dc.source.issue | 1 | |
| dc.source.journal | Microelectronics Reliability | |
| dc.source.volume | 41 | |
| dc.title | Correlation between predicted cause of SRAM failures and in-line defect data | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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