Publication:

Underlayer optimization method for EUV lithography

Date

2020
Proceedings Paper
https://doi.org/10.1117/12.2551684
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Vanelderen, Pieter  
;
Vandenbroeck, Nadia  
;
Liang, Y.C.
;
Van Driessche, Veerle  
;
Guerrero, Douglas  
;
Chacko, A.
;
De Simone, Danilo  
;
Vandenberghe, Geert  

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