Publication:

Underlayer optimization method for EUV lithography

Date

2020
Proceedings Paper
https://doi.org/10.1117/12.2551684
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Vanelderen, Pieter  
;
Vandenbroeck, Nadia  
;
Liang, Y.C.
;
Van Driessche, Veerle  
;
Guerrero, Douglas  
;
Chacko, A.
;
De Simone, Danilo  
;
Vandenberghe, Geert  

Journal

Abstract

Description

Metrics

Views

2011 since deposited on 2021-10-29
1last month
1last week
Acq. date: 2025-12-12

Citations

Metrics

Views

2011 since deposited on 2021-10-29
1last month
1last week
Acq. date: 2025-12-12

Citations