Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
Influence of pre and post process conditions on the composition of thin Si3Ni4 thin films (3nm) studied by XPS and TOFSIMS
Publication:
Influence of pre and post process conditions on the composition of thin Si3Ni4 thin films (3nm) studied by XPS and TOFSIMS
Copy permalink
Date
1999
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
De Witte, Hilde
;
Vandervorst, Wilfried
;
Houssa, Michel
;
Heyns, Marc
;
Pomarede, C.
;
Werkhoven, Chris
Journal
Abstract
Description
Metrics
Views
1888
since deposited on 2021-10-06
2
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1888
since deposited on 2021-10-06
2
last month
Acq. date: 2025-12-11
Citations