Publication:
Influence of pre and post process conditions on the composition of thin Si3Ni4 thin films (3nm) studied by XPS and TOFSIMS
Date
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | De Witte, Hilde | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Houssa, Michel | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | Pomarede, C. | |
| dc.contributor.author | Werkhoven, Chris | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Houssa, Michel | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
| dc.date.accessioned | 2021-10-06T10:49:46Z | |
| dc.date.available | 2021-10-06T10:49:46Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3312 | |
| dc.source.conference | Materials Research Society Fall Meeting; October 1999; Boston, MA, USA. | |
| dc.title | Influence of pre and post process conditions on the composition of thin Si3Ni4 thin films (3nm) studied by XPS and TOFSIMS | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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