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Ni(Pt) silicide with improved thermal stability for application in DRAM periphery and replacement metal gate devices
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2 since deposited on 2021-10-22
Acq. date: 2025-10-23
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1919 since deposited on 2021-10-22
Acq. date: 2025-10-23
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2 since deposited on 2021-10-22
Acq. date: 2025-10-23
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1919 since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations