Publication:
Ni(Pt) silicide with improved thermal stability for application in DRAM periphery and replacement metal gate devices
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Downloads
2 since deposited on 2021-10-22
Acq. date: 2025-12-10
Views
1927 since deposited on 2021-10-22
6last month
2last week
Acq. date: 2025-12-10
Citations
Metrics
Downloads
2 since deposited on 2021-10-22
Acq. date: 2025-12-10
Views
1927 since deposited on 2021-10-22
6last month
2last week
Acq. date: 2025-12-10
Citations