Publication:
Etch challenges brought by the metal hardmask approach for advanced contact patterning with fluorocarbon-based plasma
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1872 since deposited on 2021-10-17
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Acq. date: 2025-12-16
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Views
1872 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2025-12-16
Citations