Publication:

Reliability of MOL local interconnects

Date

2013

Proceedings Paper

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Files

26295.pdf 1.05 MB

Author(s)

Kauerauf, Thomas

;

;

Sorrentino, Beppo

;

Roussel, Philippe

;

Demuynck, Steven

;

;

Mercha, Abdelkarim

;

Boemmels, Juergen

;

;

Groeseneken, Guido

Metrics

1894 since deposited on 2021-10-21

Acq. date: 2025-12-11