Publication:

P+/N junction leakage in thin selectively grown Ge-in-STI substrates

Date

2010
Journal article
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Author(s)

Eneman, Geert  
;
Yang, Rui
;
Wang, Gang
;
De Jaeger, Brice  
;
Loo, Roger  
;
Claeys, Cor
;
Caymax, Matty  
;
Meuris, Marc  
;
Heyns, Marc  
;
Simoen, Eddy  

Journal

Thin Solid Films

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