Publication:
P+/N junction leakage in thin selectively grown Ge-in-STI substrates
Date
| dc.contributor.author | Eneman, Geert | |
| dc.contributor.author | Yang, Rui | |
| dc.contributor.author | Wang, Gang | |
| dc.contributor.author | De Jaeger, Brice | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Meuris, Marc | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.imecauthor | Eneman, Geert | |
| dc.contributor.imecauthor | De Jaeger, Brice | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Meuris, Marc | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
| dc.contributor.orcidimec | De Jaeger, Brice::0000-0001-8804-7556 | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-18T16:15:02Z | |
| dc.date.available | 2021-10-18T16:15:02Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0040-6090 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17077 | |
| dc.source.beginpage | 2489 | |
| dc.source.endpage | 2492 | |
| dc.source.issue | 9 | |
| dc.source.journal | Thin Solid Films | |
| dc.source.volume | 518 | |
| dc.title | P+/N junction leakage in thin selectively grown Ge-in-STI substrates | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |