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Issues, achievements and challenges towards integration of high-k dielectrics
Publication:
Issues, achievements and challenges towards integration of high-k dielectrics
Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Caymax, Matty
;
De Gendt, Stefan
;
Vandervorst, Wilfried
;
Heyns, Marc
;
Bender, Hugo
;
Carter, Richard
;
Conard, Thierry
;
Degraeve, Robin
;
Groeseneken, Guido
;
Kubicek, Stefan
;
Lujan, Guilherme
;
Pantisano, Luigi
;
Petry, Jasmine
;
Röhr, Erika
;
Van Elshocht, Sven
;
Zhao, Chao
;
Cartier, Eduard
;
Chen, Jerry
;
Cosnier, Vincent
;
Jang, Se Aug
;
Kaushik, Vidya
;
Kerber, Andreas
;
Kluth, Jon
;
Lin, S.
;
Tsai, Wilman
;
Young, Edward
;
Manabe, Y.
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2008
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2008
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations