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Issues, achievements and challenges towards integration of high-k dielectrics

Date

2002
Proceedings Paper
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dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.contributor.authorBender, Hugo
dc.contributor.authorCarter, Richard
dc.contributor.authorConard, Thierry
dc.contributor.authorDegraeve, Robin
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorKubicek, Stefan
dc.contributor.authorLujan, Guilherme
dc.contributor.authorPantisano, Luigi
dc.contributor.authorPetry, Jasmine
dc.contributor.authorRöhr, Erika
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorZhao, Chao
dc.contributor.authorCartier, Eduard
dc.contributor.authorChen, Jerry
dc.contributor.authorCosnier, Vincent
dc.contributor.authorJang, Se Aug
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-14T21:12:58Z
dc.date.available2021-10-14T21:12:58Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6088
dc.source.beginpage?
dc.source.conferenceFrontiers in Electronics. Future Chips. Proceedings of the 2002 Workshop
dc.source.conferencedate6/01/2002
dc.source.conferencelocationSt. Croix USA
dc.source.endpage?
dc.title

Issues, achievements and challenges towards integration of high-k dielectrics

dc.typeProceedings paper
dspace.entity.typePublication
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