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Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions
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Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions
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Date
2023
Journal article
https://doi.org/10.1116/6.0002347
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10.96 MB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Dongen, Kaat
;
Nye, Rachel
;
Clerix, Jan-Willem
;
Sixt, Claudia
;
De Simone, Danilo
;
Delabie, Annelies
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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237
since deposited on 2023-04-06
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Acq. date: 2025-12-16
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1282
since deposited on 2023-04-06
Acq. date: 2025-12-16
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Metrics
Downloads
237
since deposited on 2023-04-06
38
last month
5
last week
Acq. date: 2025-12-16
Views
1282
since deposited on 2023-04-06
Acq. date: 2025-12-16
Citations