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Investigation of fired and non-fired Si-SiNx interface properties by deep-level transient spectroscopy measurements
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Investigation of fired and non-fired Si-SiNx interface properties by deep-level transient spectroscopy measurements
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Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gong, Chun
;
Simoen, Eddy
;
Yang, Rui
;
Posthuma, Niels
;
Van Kerschaver, Emmanuel
;
Poortmans, Jef
;
Mertens, Robert
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1963
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1963
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-10
Citations