Investigation of fired and non-fired Si-SiNx interface properties by deep-level transient spectroscopy measurements

dc.contributor.author	Gong, Chun
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Yang, Rui
dc.contributor.author	Posthuma, Niels
dc.contributor.author	Van Kerschaver, Emmanuel
dc.contributor.author	Poortmans, Jef
dc.contributor.author	Mertens, Robert
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.imecauthor	Posthuma, Niels
dc.contributor.imecauthor	Poortmans, Jef
dc.contributor.imecauthor	Mertens, Robert
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimec	Posthuma, Niels::0000-0002-6029-1909
dc.contributor.orcidimec	Poortmans, Jef::0000-0003-2077-2545
dc.date.accessioned	2021-10-17T22:26:13Z
dc.date.available	2021-10-17T22:26:13Z
dc.date.issued	2009
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/15364
dc.source.beginpage	1210-Q05-04
dc.source.conference	MRS Fall Meeting Symposium Q: Photovoltaic Materials and Manufacturing Issues II
dc.source.conferencedate	30/11/2009
dc.source.conferencelocation	Boston, MA USA
dc.title	Investigation of fired and non-fired Si-SiNx interface properties by deep-level transient spectroscopy measurements
dc.type	Proceedings paper
dspace.entity.type	Publication
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