Challenges in using optical lithography for the building of a 22 nm node 6T=-SRAM cell

Ercken, Monique; Altamirano Sanchez, Efrain; Baerts, Christina; Brus, Stephan; De Backer, Johan; Delvaux, Christie; Demand, Marc; Horiguchi, Naoto; Locorotondo, Sabrina; Vandeweyer, Tom; Veloso, Anabela; Verhaegen, Staf

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Challenges in using optical lithography for the building of a 22 nm node 6T=-SRAM cell

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2010

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Ercken, Monique

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Altamirano Sanchez, Efrain

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Microelectronic Engineering

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Challenges in using optical lithography for the building of a 22 nm node 6T=-SRAM cell

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