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Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP
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1906 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-08
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Views
1906 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-08
Citations