Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP

dc.contributor.author	Armini, Silvia
dc.contributor.author	Whelan, Caroline
dc.contributor.author	Moinpour, Mansour
dc.contributor.author	Maex, Karen
dc.contributor.imecauthor	Armini, Silvia
dc.contributor.imecauthor	Maex, Karen
dc.contributor.orcidimec	Armini, Silvia::0000-0003-0578-3422
dc.date.accessioned	2021-10-17T06:14:04Z
dc.date.available	2021-10-17T06:14:04Z
dc.date.issued	2008
dc.identifier.issn	0013-4651
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/13314
dc.source.beginpage	H401
dc.source.endpage	H406
dc.source.issue	6
dc.source.journal	Journal of the Electrochemical Society
dc.source.volume	155
dc.title	Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP
dc.type	Journal article
dspace.entity.type	Publication
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