Publication:

Characterization of PECVD silicon nitride photonic components at 532 and 900 nm wavelength

Date

2014

Proceedings Paper

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Author(s)

Neutens, Pieter

;

Subramanian, Ananth

;

Mahmud Ul Hasan, Hasan MD

;

;

;

;

Rottenberg, Xavier

;

;

Leyssens, Kenny

;

Helin, Philippe

;

;

;

Peyskens, Frederic

;

;

Deshpande, Paru

;

;

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Acq. date: 2026-03-16