Publication:

Characterization of PECVD silicon nitride photonic components at 532 and 900 nm wavelength

Date

2014
Proceedings Paper
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dc.contributor.authorNeutens, Pieter
dc.contributor.authorSubramanian, Ananth
dc.contributor.authorMahmud Ul Hasan, Hasan MD
dc.contributor.authorChen, Chang
dc.contributor.authorJansen, Roelof
dc.contributor.authorClaes, Tom
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorDu Bois, Bert
dc.contributor.authorLeyssens, Kenny
dc.contributor.authorHelin, Philippe
dc.contributor.authorSeveri, Simone
dc.contributor.authorDhakal, Ashim
dc.contributor.authorPeyskens, Frederic
dc.contributor.authorLagae, Liesbet
dc.contributor.authorDeshpande, Paru
dc.contributor.authorBaets, Roel
dc.contributor.authorVan Dorpe, Pol
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorMahmud Ul Hasan, Hasan MD
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorLeyssens, Kenny
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorPeyskens, Frederic
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.imecauthorDeshpande, Paru
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorVan Dorpe, Pol
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecDeshpande, Paru::0000-0002-9693-5761
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.contributor.orcidimecVan Dorpe, Pol::0000-0003-0918-1664
dc.date.accessioned2021-10-22T04:16:52Z
dc.date.available2021-10-22T04:16:52Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24319
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1868121&resultClick=1
dc.source.beginpage91331F
dc.source.conferenceSilicon Photonics and Photonic Integrated Circuits IV
dc.source.conferencedate14/04/2014
dc.source.conferencelocationBrussels Belgium
dc.title

Characterization of PECVD silicon nitride photonic components at 532 and 900 nm wavelength

dc.typeProceedings paper
dspace.entity.typePublication
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