Publication:

Investigating ESD sensitivity in electrostatic SiGe MEMS

Date

Loading...
Thumbnail Image

Abstract

Description

Metrics

Views

1909 since deposited on 2021-10-18
409item.page.metrics.field.last-week
Acq. date: 2025-10-24

Citations

Metrics

Views

1909 since deposited on 2021-10-18
409item.page.metrics.field.last-week
Acq. date: 2025-10-24

Citations