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Investigating ESD sensitivity in electrostatic SiGe MEMS
Publication:
Investigating ESD sensitivity in electrostatic SiGe MEMS
Date
2010
Journal article
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20003.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sangameswaran, Sandeep
;
De Coster, Jeroen
;
Linten, Dimitri
;
Scholz, Mirko
;
Thijs, Steven
;
Groeseneken, Guido
;
De Wolf, Ingrid
Journal
Journal of Micromechanics and Microengineering
Abstract
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1909
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Metrics
Views
1909
since deposited on 2021-10-18
409
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations