Publication:

Investigating ESD sensitivity in electrostatic SiGe MEMS

Date

2010
Journal article
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dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLinten, Dimitri
dc.contributor.authorScholz, Mirko
dc.contributor.authorThijs, Steven
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-18T21:12:57Z
dc.date.available2021-10-18T21:12:57Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17937
dc.source.beginpage55005
dc.source.issue5
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.volume20
dc.title

Investigating ESD sensitivity in electrostatic SiGe MEMS

dc.typeJournal article
dspace.entity.typePublication
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