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Ion Beam Induced Modification of Si-Based Material during Sputter Profiling
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Ion Beam Induced Modification of Si-Based Material during Sputter Profiling
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Date
1995-01
Dissertation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Coster, Walter
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Abstract
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2118
since deposited on 2021-09-29
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Acq. date: 2026-01-25
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Statistics
Views
2118
since deposited on 2021-09-29
2
last month
Acq. date: 2026-01-25
Citations