Publication:
Ion Beam Induced Modification of Si-Based Material during Sputter Profiling
Date
| dc.contributor.author | De Coster, Walter | |
| dc.date.accessioned | 2021-09-29T13:04:56Z | |
| dc.date.available | 2021-09-29T13:04:56Z | |
| dc.date.issued | 1995-01 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/584 | |
| dc.title | Ion Beam Induced Modification of Si-Based Material during Sputter Profiling | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |