Publication:

Alleviation of Negative-Bias Temperature Instability in Si p-FinFETs With ALD W Gate-Filling Metal by Annealing Process Optimization

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290 since deposited on 2021-11-02
Acq. date: 2025-10-23

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1656 since deposited on 2021-11-02
Acq. date: 2025-10-23

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Downloads

290 since deposited on 2021-11-02
Acq. date: 2025-10-23

Views

1656 since deposited on 2021-11-02
Acq. date: 2025-10-23

Citations