Publication:
Alleviation of Negative-Bias Temperature Instability in Si p-FinFETs With ALD W Gate-Filling Metal by Annealing Process Optimization
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Acq. date: 2026-08-07
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1665 since deposited on 2021-11-02
Acq. date: 2026-08-07
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663 since deposited on 2021-11-02
54last month
7last week
Acq. date: 2026-08-07
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1665 since deposited on 2021-11-02
Acq. date: 2026-08-07
Citations