Publication:
Alleviation of Negative-Bias Temperature Instability in Si p-FinFETs With ALD W Gate-Filling Metal by Annealing Process Optimization
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551 since deposited on 2021-11-02
39last month
11last week
Acq. date: 2026-04-05
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1663 since deposited on 2021-11-02
2last month
1last week
Acq. date: 2026-04-05
Citations