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Untersuchung der Anreicherung von Germanium in heliumimplantierten SiGe/Si-Heterostrukturen durch Oxidation
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1952 since deposited on 2021-10-16
1last month
Acq. date: 2026-04-05
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Statistics
Views
1952 since deposited on 2021-10-16
1last month
Acq. date: 2026-04-05
Citations