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Untersuchung der Anreicherung von Germanium in heliumimplantierten SiGe/Si-Heterostrukturen durch Oxidation
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1949 since deposited on 2021-10-16
Acq. date: 2025-10-23
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Views
1949 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations