Publication:
Untersuchung der Anreicherung von Germanium in heliumimplantierten SiGe/Si-Heterostrukturen durch Oxidation
Date
| dc.contributor.author | Hueging, N. | |
| dc.contributor.author | Luysberg, M. | |
| dc.contributor.author | Buca, D. | |
| dc.contributor.author | Hollander, B. | |
| dc.contributor.author | Mantl, S. | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Urban, K. | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-16T02:12:58Z | |
| dc.date.available | 2021-10-16T02:12:58Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10622 | |
| dc.source.conference | Fr|hjahrstagung der Deutschen Physischen Gesellschaft | |
| dc.source.conferencedate | 4/03/2005 | |
| dc.source.conferencelocation | Berlin Germany | |
| dc.title | Untersuchung der Anreicherung von Germanium in heliumimplantierten SiGe/Si-Heterostrukturen durch Oxidation | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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