Publication:
Semiconductor profiling with sub-nm resolution: Chalenges and solutions
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-17T12:10:12Z | |
| dc.date.available | 2021-10-17T12:10:12Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2008 | |
| dc.identifier.issn | 0169-4332 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14698 | |
| dc.source.beginpage | 805 | |
| dc.source.endpage | 812 | |
| dc.source.issue | 4 | |
| dc.source.journal | Applied Surface Science | |
| dc.source.volume | 255 | |
| dc.title | Semiconductor profiling with sub-nm resolution: Chalenges and solutions | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |