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New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
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Acq. date: 2026-10-09
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Acq. date: 2026-10-09
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1 since deposited on 2021-10-18
Acq. date: 2026-10-09
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1972 since deposited on 2021-10-18
1last month
Acq. date: 2026-10-09
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