Publication:
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
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1 since deposited on 2021-10-18
Acq. date: 2026-01-25
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1964 since deposited on 2021-10-18
Acq. date: 2026-01-25
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Downloads
1 since deposited on 2021-10-18
Acq. date: 2026-01-25
Views
1964 since deposited on 2021-10-18
Acq. date: 2026-01-25
Citations