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Degradation and breakdown of 0.9 nm EOT SiO2/ ALD HfO2/metal gate stacks under positive constant voltage stress

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1932 since deposited on 2021-10-16
3last month
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Acq. date: 2026-01-25

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1932 since deposited on 2021-10-16
3last month
1last week
Acq. date: 2026-01-25

Citations