Publication:
Investigation of physical and electrical scaling limits of strontium titanate in metal-insulator-metal capacitors for DRAM technology
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1907 since deposited on 2021-10-23
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Acq. date: 2026-08-07
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Views
1907 since deposited on 2021-10-23
4last month
2last week
Acq. date: 2026-08-07
Citations