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Investigation of physical and electrical scaling limits of strontium titanate in metal-insulator-metal capacitors for DRAM technology
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1898 since deposited on 2021-10-23
1last month
Acq. date: 2025-12-15
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Views
1898 since deposited on 2021-10-23
1last month
Acq. date: 2025-12-15
Citations