Publication:

Investigation of physical and electrical scaling limits of strontium titanate in metal-insulator-metal capacitors for DRAM technology

Date

2016
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dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorKaczer, Ben
dc.contributor.authorHody, Hubert
dc.contributor.authorJurczak, Gosia
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorHody, Hubert
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecPopovici, Mihaela Ioana::0000-0002-9838-1088
dc.date.accessioned2021-10-23T13:51:05Z
dc.date.available2021-10-23T13:51:05Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27164
dc.source.beginpage131
dc.source.conference19th Workshop on Dielectrics in Microelectronics - WODIM
dc.source.conferencedate27/06/2016
dc.source.conferencelocationCatania Italia
dc.source.endpage132
dc.title

Investigation of physical and electrical scaling limits of strontium titanate in metal-insulator-metal capacitors for DRAM technology

dc.typeMeeting abstract
dspace.entity.typePublication
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