Publication:
Direct evidence of linewidth effect: Ni31Si12 and Ni3Si formation on 25 nm Ni fully silicided gates
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1899 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-15
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Views
1899 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-15
Citations