Publication:
Direct evidence of linewidth effect: Ni31Si12 and Ni3Si formation on 25 nm Ni fully silicided gates
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1903 since deposited on 2021-10-16
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Acq. date: 2026-04-26
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Statistics
Views
1903 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2026-04-26
Citations