Publication:
Direct evidence of linewidth effect: Ni31Si12 and Ni3Si formation on 25 nm Ni fully silicided gates
Date
| dc.contributor.author | Kittl, Jorge | |
| dc.contributor.author | Lauwers, Anne | |
| dc.contributor.author | Demeurisse, Caroline | |
| dc.contributor.author | Vrancken, Christa | |
| dc.contributor.author | Kubicek, Stefan | |
| dc.contributor.author | Absil, Philippe | |
| dc.contributor.author | Biesemans, Serge | |
| dc.contributor.imecauthor | Lauwers, Anne | |
| dc.contributor.imecauthor | Demeurisse, Caroline | |
| dc.contributor.imecauthor | Vrancken, Christa | |
| dc.contributor.imecauthor | Kubicek, Stefan | |
| dc.contributor.imecauthor | Absil, Philippe | |
| dc.contributor.imecauthor | Biesemans, Serge | |
| dc.date.accessioned | 2021-10-16T17:07:48Z | |
| dc.date.available | 2021-10-16T17:07:48Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12403 | |
| dc.source.beginpage | 172107 | |
| dc.source.issue | 17 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 90 | |
| dc.title | Direct evidence of linewidth effect: Ni31Si12 and Ni3Si formation on 25 nm Ni fully silicided gates | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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