Publication:
Etch challenges on single and dual SOI fins patterning for CFET at 25nm fin pitch
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2039 since deposited on 2021-10-27
4last month
2last week
Acq. date: 2026-01-09
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Views
2039 since deposited on 2021-10-27
4last month
2last week
Acq. date: 2026-01-09
Citations